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AW-105R Plasma Asher Plasma Descum

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Country:

USA

Model No:

AW-105R Plasma Asher Plasma Descum

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(Negotiable) Get Latest Price

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Allwin21 Corp.

USA

Free Member

Contact Person Mr. Peter

220 Cochrane Circle, Morgan Hill, California

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Product Specification

Made in USA:3-Axis Robot wafer transfer
Production Proven Equipment:Much better performance with Allwin21 new control technologi

Product Description

The AW***5R single-wafer photoresist asher and descum is an automated tool designed as a flexible *3.*6MHz RF Parallel Plate plasma photoresist removal and descum system for high-volume wafer fabrication. The AW***5R is in direct response to manufacturers concerns for wafer uniformity, uptime, reliability and production-proven technology.
AW***5R Configuration:
       Main Frame with Circuit Breakers, Solenoid Valves
       Pentium Class PC with AW Software
       Keyboard, Mouse, USB SW backup, and Cables
       Chuck /w Heat, Pump Ring ,Lift Pins

① **4 inch; ② **6 inch;③ **6 inch;④ 6.**5 inch;⑤ 6.*5 inch

Center Aligner and Cassette Station

① Two Dimensions ② Four Dimensions

       Anodized Reactor with Door
       Chamber Base plate with water sensor
       Base Plate and Reactor Ceramic Ring
       Base Plate and Chuck Ceramic Ring
       Upper and Lower Electrodes
       Quartz showerhead & Diffusion Disk
       Main Control and Distribution PCBs
       *-axis Integrated Robust Solid Robot
       RF Matching Network with PCBs
       *3.*6MHz RF Generator

① **0W ② **0W

MFC /w In-line Filter and Solenoid Isolation Valve

① One MFC; ② Two MFCs; ③ Three MFCs

       AC/DC Box with Temperature Controller
       MKS Baratron with Isolation Valve
       Lamp Tower Alarm w/ Buzzer
       Throttle Valve
       Main Vacuum Valve
       Front EMO, Interlocks
       **-inch Touch Screen GUI
AW***5R Options:
       End-of-Process (EOP)
       GEM/SECS II (Software)
       Vacuum Pump
       Chiller for Chamber Base Plate

Country:	USA
Model No:	AW-105R Plasma Asher Plasma Descum
FOB Price:	(Negotiable) Get Latest Price
Place of Origin:	-
Price for Minimum Order:	-
Minimum Order Quantity:	-
Packaging Detail:	Contact us by ***** for detail
Delivery Time:	-
Supplying Ability:	-
Payment Type:	-
Product Group :	-